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Publication # 174 |
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| K. W. Goossen, J. A. Walker, L. A. D'Asaro, B. Tseng, R.
Leibenguth, D. Kossives, D. D. Bacon, D. Dahringer, L. M. F. Chirovsky, A. L. Lentine,
D. A. B. Miller "GaAs MQW Modulators Integrated with Silicon
CMOS" IEEE Photonics Technology Letters, 7, 360-362, 1995. We demonstrate integration of GaAs-AlGaAs multiple quantum well modulators to silicon CMOS circuitry via flip-chip solder-bonding followed by substrate removal. We obtain 95% device yield for 32*32 arrays of devices with 15 micron solder pads. We show operation of a simple circuit composed of a modulator and a CMOS transistor
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