|
H.
L. Kung, S. R. Bhalotra, D. A. B. Miller, "Compact Standing-Wave
Transform Spectrometer Based on Integrated MEMS Mirror and Thin-Film
Photodetector," Paper I-3, IEEE/LEOS Optical MEMS 2001,
International Conference on Optical MEMS and Their Applications, 25 -
28 September 2001 Bankoku Shinryokan and Busena Terrace Resort, Okinawa, Japan001) We
demonstrate an integrated standing-wave Fourier-transform
spectrometer, 17 x 13 x 2 mm, with 32 nm spectral resolution at
665 nm.
The compact, 1-D system design offers mirror stability,
guarantees relatitive component alignment, and should enable simple
fabrication of imaging arrays of spectrometers.
Full text available for
download |