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G.A. Keeler, N.C. Helman, P. Atanackovic, and D.
A. B. Miller, "Cavity Resonance Tuning of Asymmetric Fabry-Perot
MQW Modulators Following Flip-Chip Bonding to Silicon CMOS," in
Optics in Computing 2002, Taipei, Taiwan (April 8-11, 2002) Paper OWA2
We
present a post-integration cavity resonance tuning technique for
asymmetric Fabry-Perot MQW modulators flip-chip bonded to silicon
CMOS. The process relies on highly selective chemical etching and GaAs
surface oxidation. Device characteriitics are discussed.
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